GLAD System For Semiconductor Apps


The GLAD System is a Gas to Liquid Absorption Device, and when used with CO2, it is an ESD (Electrostatic Discharge) Eliminator System. It controls the resistivity of the DI water by supplying the CO2 through a GLAD device developed by Superior Automation. This proprietary device eliminates the need for a bubbler system using hollow fiber glass permeable membranes.

The GLAD System is designed to fit between the DI water in/out lines and the system using the DI water. The specific resistance value and pH of the DI water can be adjusted by regulating the amount of CO2 from the GLAD device into the DI water. The adjustment for proper values is easy and simple to use.