Automated Operator/Tool Interface and Recipe Selection with Data Collection for any SECS/GEM compliant Tool.
Plug in module to GEMSTATION adding Lot Validation and Automated Recipe Lookup functionality with built-in Process Recipe Adjustment Capability. Interfaces with MES, SQL, SPC, RF ID tags, etc
Web based remote interface providing comprehensive reporting and data analysis tools including:
- Fab wide Equipment and Lot Tracking
- Equipment Performance and Run to Run Analysis
- Production Reporting and Tool Utilization
- Also available in a stand-alone version for Tools not offering a SECS/GEM Compliant Interface
External Data Monitoring of endpoint Process Variables in real-time (with a 1 millisecond time resolution). Offers both Store and Forward Capabilities
GEM INTERLOCK CONTROLLER™
Provides Automated interface, Process Verification and Tool Interlocking for Process Tools having no communication interface
GEM CELL CONTROLLER
Custom Integration Service providing an Automated Interface for Tools that are not GEM Compliant but have an available standard communication interface
- Seamlessly integrates with your MES system, automatically uploading Process Recipes via Barcode or RFID scanning of Lot ID
- Prevent Misprocessing due to Operator error or improper Tool Setup via GO/NO-GO Decision Making capability
- Receive Tool Status Update in real-time without ever having to go in the fab.
- Gain convenient and direct access to comprehensive reporting and analytical Tools right at your desktop.