Superior Automation’s line of Chemical/Solvent Delivery Systems are designed to minimize production costs and streamline your production process by eliminating the need for manual chemical pouring. Our systems are made to have the smallest footprint, are easy to use and maintain, and have the lowest cost of ownership. Below are a few examples of systems we currently support in the field.
Standard Features
- Designed for Acids/Bases
- Side by Side Mounting
- Front Access Service
- Single or Dual Drums
- 5gal-100gal Drums
- Automatic Drum Switch Over
- Compatible at All Concentrations
- Advanced Intelligent Controls
- Multi-Tool Collection
- Compliant Standards CE, FM, NFPA, NEC, SEMI S2, S8, SOP39
Benefits
- Optimized Performance
- Optimized Flexibility
- Reduced Energy Consumption
- Flexible Chemistry Applications
- Maximum Reliability
- Maintenance Friendly
- Easy to Use, Easy to Maintain
- Smallest Footprint Available
- Easy Installation
- Lowest Cost of Ownership
Flexible Options
- Standard and Custom Applications
- Chemical Waste Collection Systems
- Multi-Valve Manifold Boxes
- Networking/Host Interface
- Chemical Management Software
- Unlimited Automation
- Unlimited Options
Industries
- Semiconductor
- Micro/Nano Electronics
- Compound Semiconductor
- Disk Drive
- Bio/Medical Devices
- Photonics
- Aerospace
- Automotive
- LED/OLEO
- Optics
- MEMS
- CPV
Applications
- Acids/Bases
- Flammable Liquids
- Special Applications Engineering
Products and Services
- Wafer/Substrate Surface Cleaning, Etching, Plating, Stripping and Texturing Equipment
- Batch and Single Wafer/Substrates
- Fully Automated, Semi Automated and Manual
- Bulk Chemical Distribution Systems
- Bulk Chemical Recovery Systems
- Bulk Chemical Mix and Distribution Systems
- OEM Wet Process Equipment Reconditioning and Upgrades
- Applications Engineering
Standard Features
- Designed for Solvents
- Side by Side Mounting
- Front Access Service
- Single or Dual Drums
- 5gal-100gal Drums
- Automatic Drum Switch Over
- Compatible at All Concentrations
- Advanced Intelligent Controls
- Multi-Tool Distributions
- Compliant Standards CE, FM, NFPA, NEC, SEMI S2, S8, SOP39
Benefits
- Optimized Performance
- Optimized Flexibility
- Reduced Energy Consumption
- Flexible Chemistry Applications
- Maximum Reliability
- Maintenance Friendly
- Easy to Use, Easy to Maintain
- Smallest Footprint Available
- Easy Installation
- Lowest Cost of Ownership
Flexible Options
- Standard and Custom Applications
- Filtration Multi-Stage Recirculation
- Multi-Valve Manifold Box’s
- IN-Line Chemical Metrology System
- Networking/Host Interface
- Chemical Management Software
- Unlimited Automation
- Unlimited Options
Industries
- Semiconductor
- Micro/Nano Electronics
- Compound Semiconductor
- Disk Drive
- Bio/Medical Devices
- Photonics
- Aerospace
- Automotive
- LED/OLEO
- Optics
- MEMS
- CPV
Applications
- Solvents
- Flammable Liquids
- Special Applications Engineering
Products and Services
- Wafer/Substrate Surface Cleaning, Etching, Plating, Stripping and Texturing Equipment
- Batch and Single Wafer/Substrates
- Fully Automated, Semi Automated and Manual
- Bulk Chemical Distribution Systems
- Bulk Chemical Recovery Systems
- Bulk Chemical Mix and Distribution Systems
- OEM Wet Process Equipment Reconditioning and Upgrades
- Applications Engineering
Standard Features
- Designed for Acids and Bases
- Mixing/Blending and Distribution in One Unit
- Side by Side Mounting
- Front Access Service
- Dilutes and Blends Aqueous Chemicals
- Dilutes and Blends Powdered Chemicals (Granules and Pellets)
- 5gal-55gal Drums
- Automatic Drum Switch Over
- Compatible at All Concentrations
- Advanced Intelligent Controls
- Multi-Tool Distributions
- Compliant Standards CE, FM, NFPA, NEC, SEMI S2, S8, SOP39
Benefits
- Optimized Performance
- Optimized Flexibility
- Reduced Energy Consumption
- Flexible Chemistry Applications
- Maximum Reliability
- Maintenance Friendly
- Easy to Use, Easy to Maintain
- Smallest Footprint Available
- Easy Installation
- Lowest Cost of Ownership
Flexible Options
- Standard and Custom Applications
- Filtration Multi-Stage
- Recirculation
- Multi-Valve Manifold Boxes
- IN-Line Chemical Metrology System
- Networking/Host Interface
- Chemical Management Software
- Unlimited Automation
- Unlimited Options
Industries
- Semiconductor
- Micro/Nano Electronics
- Compound Semiconductor
- Disk Drive
- Bio/Medical Devices
- Photonics
- Aerospace
- Automotive
- LED/OLEO
- Optics
- MEMS
- CPV
Applications
- Acids
- Bases
- CMP/Slurry
- Plating
- Surfactants
- Special Applications Engineering
Products and Services
- Wafer/Substrate Surface Cleaning, Etching, Plating, Stripping and Texturing Equipment
- Batch and Single Wafer/Substrates
- Fully Automated, Semi Automated and Manual
- Bulk Chemical Distribution Systems
- Bulk Chemical Recovery Systems
- Bulk Chemical Mix and Distribution Systems
- OEM Wet Process Equipment Reconditioning and Upgrades
- Applications Engineering
Standard Features
- 7″ HMI, Light Tower Light, Leak Detection, Local EMO Button
- EtherNet Communications to SA Dispense Systems
- Relay Contact Communications to Multi Manufacturers CDU’s
- Advanced Intelligent Controls
- Programmable Independent Valve Dispense Time-Outs
- Programmable Independent Valve/Tools Labels
- Alarm Logging/Event Logging
- Multi-Tool Distribution
- High Purity Fluid Handling
- Supply and Outlet Manual Shut-Off Valves
- Independent Valves and Manual Shut-Off Valve
- Independent N2 Purge or DI Water Flush Ports
- Compliant Standards CE, FM, NFPA, NEC, SEMI S1, S2, S8, SOP39
Benefits
- Can Connect to Multiple Manufacturers CDU’s
- Optimized Performance
- Optimized Flexibility
- Reduced Energy Consumption
- Flexible Chemistry Applications
- Maximum Reliability
- Maintenance Friendly
- Easy to Use, Easy to Maintain
- Smallest Footprint Available
- 41″ W x 10″ D x 25″ H
- Easy Installation
- Lowest Cost of Ownership
Flexible Options
- 24VDC or 100-240VAC Power Input
- 1/2″-3/4″-1″ Valve Outlet Ports
- Made to Handle Solvents or Acid/Bases
- Top Supply Outlets, Bottom Supply Outlets, Side Supply Outputs
- Custom Valve Manifold Boxes
- 2-Stick, 4-Stick, 6-Stick, 8-Stick, 10-Stick, 12-Stick Valve Manifold Boxes
- Networking/Host Interface
- Chemical Management Software
- Unlimited Automation
- Unlimited Options
Industries
- Semiconductor
- Micro/Nano Electronics
- Compound Semiconductor
- Disk Drive
- Bio/Medical Devices
- Photonics
- Aerospace
- Automotive
- LED/OLED
- Optics
- MEMS
- CPV
Applications
- Acids/Bases or Solvents
- Surfactants
- Special Applications Engineering
Products and Services
- Wafer/Substrate Surface Cleaning, Etching, Plating, Stripping and Texturing Equipment
- Batch and Single Wafer/Substrates
- Fully Automated, Semi Automated and Manual
- Bulk Chemical/Solvent Distribution Systems
- Bulk Chemical/Solvent Recovery Systems
- Bulk Chemical Mix and Distribution Systems
- Equipment-Host Connectivity Solutions via SA-GemStation Software (GEM and non-GEM Compliant Tools)
- OEM Wet Process Equipment Reconditioning and Upgrades
- Applications Engineering
