ACURA Hot DI Water System
Benefits
- Economical Priced
- Single Pass Instantaneous Hot Dl Water
- Compact Footprint
- Superior Temperature Controls
- 0.5 to 45GPM 1.89 to 170LPM Flow Rates
- Optimized Process Performance
- Optimized Process Flexibility
- Reduced Dl Water and Energy Consumption
- High Purity
- Maximum Reliability
- Maintenance Friendly
- Easy to Use, Easy to Maintain
- Smallest Footprint Available
- Easy Installation
- Lowest Cost of Ownership
Standard Features
- Point of Use
- Temperature Range 30C to 95C
- Multi-Pont Temperature Monitoring and Control
- Advanced Intelligent Process Controls
- High Purity Fluid Path
- FM491 0 Approved Construction
- 110% Secondary Containment
- Leak Detection
- Advanced Safety Controls
- Isolated Controls
- Low Voltage Controls 24VDC
- Power 208VAC, 230VAC, 380VAC, 400VAC and 480VAC 3Ph
- Compliant Standards CE, FM, NFPA, NEC, SEMI 52, 58, SOP39
Industries
- Semiconductor
- Micro/Nano Electronics
- Compound Semiconductor
- Disk Drive
- Bio/Medical Devices
- Photonics
- Aerospace
- Automotive
- LED/OLEO
- Optics
- MEMS
- CPV
Applications
- Cleaning
- Etching
- Plating
- Stripping
- Texturing
- Pre and Post Wafer Processing
- CVD Parts Cleaning
- Industrial Parts Cleaning
- Special Applications Engineering
Flexible Options
- 12kW to 1,000 kW Units Available
- 0.5 to 45GPM (1.89 to 170LPM) Flow Rates
- Temperature Range 30C to 95C
- Resistivity Monitoring
- pH Monitoring
- Dissolved Oxygen Monitoring
- O2 Free Dl Water
- Programmable Dl Water pH Levels
- Programmable Dl Water Resistivity Levels
- SA GLAD Systems (Bubble and Membrane Free Gas Dissolving Systems)
- Programmable Flow Rate Controls
- Polypropylene or Painted Steel Enclosures
- Remote Controls
- Ethernet Communications
- FIS Interface
Products and Services
- Wafer/Substrate Surface Cleaning, Etching, Plating, Stripping and Texturing Equipment
- Batch and Single Wafer/Substrates
- Fully Automated, Semi Automated and Manual
- Bulk Chemical Distribution Systems
- Bulk Chemical Recovery Systems
- Bulk Chemical Mix and Distribution Systems
- OEM Wet Process Equipment Reconditioning and Upgrades
- Applications Engineering