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Superior Automation’s Wet Benches are custom made to order systems designed with safety and ease of use in mind. We offer manual, semi-automated, and fully automated solutions for both acid and solvent applications that are made to fit the smallest footprint necessary while offering the lowest cost of ownership.

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SA provides standard and custom solutions to single wafer processing such as CO2 wafer cleaning, EFEM, and other custom solutions.

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superior automation machine options

Superior Automation’s line of Chemical/Solvent Delivery Systems are designed to minimize production costs and streamline your production process by eliminating the need for manual chemical pouring. Our systems are made to have the smallest footprint, are easy to use and maintain, and have the lowest cost of ownership. 

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Superior Automation chemical waste collection systems provide a simple solution to chemical waste removal. All waste collection systems are made to fit the smallest footprint, made to be easy to use and maintain, and have the lowest cost of ownership.

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Superior Automation is your process equipment and fab automation partner!

Superior Automation was established in 1994 by a group of industry engineers and professionals. Drawing experience from both Fab and OEM supplier backgrounds the founders saw a need for a higher level of quality and technology in automation solutions supplied to the semiconductor and disk drive Industries. Superior Automation has since grown to offer a wide spectrum of cutting edge automation solutions for a variety of industries and customers, both nationally and internationally.

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Products · Services · Support

We are proud of our products and services; however, we are most proud of our history of support with the various customers that we have worked with since 1994. Our reputation in the industry for having a high level of pride and ownership in what we sell, what we service, and what we do for our customers is what sets us apart in the various industries as a solution-based company.

We are here to make your life easier, reduce your stress level, and make you money. Tell us your problem, and we will tell you how we can help you!