Benefits
- Optimized Process Performance
- Maximum Throughput
- Optimized Process Flexibility
- Reduced Energy Consumption
- Reduced DIW-Chemical Consumption
- Maximum Chemical Life
- Flexible Chemistry Applications
- Maximum Reliability
- Maintenance Friendly
- Easy to Use, Easy to Maintain
- Smallest Footprint Available
- Easy Installation
- Lowest Cost of Ownership
Industries
- Semiconductor
- Micro/Nano Electronics
- Compound Semiconductor
- Disk Drive
- Bio/Medical Devices
- Photonics
- Aerospace
- Automotive
- LED/OLEO
- Optics
- MEMS
- CPV
Products & Services
- Wafer/Substrate Surface Cleaning, Etching, Plating, Stripping and Texturing Equipment
- Batch and Single Wafer/Substrates
- Fully Automated, Semi Automated and Manual
- Bulk Chemical Distribution Systems
- Bulk Chemical Recovery Systems
- Bulk Chemical Mix and Distribution Systems
- Equipment-Host Connectivity Solutions via SA- GemStation Software (GEM and non-GEM Compliant Tools
- OEM Wet Process Equipment Reconditioning and Upgrades
- Applications Engineering
- Unlimited Options
Standard Features
- 25 to 100 Wafer Lots
- 75mm to 300mm Wafers
- Multi-Lot Processing
- Parallel-Wafer Size Lot Processing
- Advanced Intelligent Process Controls
- Compliant Standards CE, FM, NFPA, NEC, SEMI S2, S8, SOP39
Applications
- Cleaning
- Developing
- Etching
- Electro-Plating
- Stripping
- Texturing
- Special Applications Engineering
Flexible Options
- Standard and Custom Applications
- Class 10 Mini Environment
- Automatic Etch Rate Calculation
- IN-Line Chemical Metrology System
- Automatic Chemical Fill
- Automatic Chemical Mixing-Dosing/Spiking
- Fixed or Multi-Frequency Megasonics’s 750kHz to 2.0mHz
- Fixed or Multi-Frequency Ultrasonic’s 25kHz to 430kHz
- In Tank Dedicated Agitators 0-80 Cycles Per Min
- Bi-Directional Chemical Recirculation Flow
- Single or Double Sided Single Wafer Scrub Station
- Cassette-less Wafer Processing
- Drying Technologies
- Unlimited Automation
- Unlimited Options
