Benefits

  • Optimized Process Performance
  • Maximum Throughput
  • Optimized Process Flexibility
  • Reduced Energy Consumption
  • Reduced DIW-Chemical Consumption
  • Maximum Chemical Life
  • Flexible Chemistry Applications
  • Maximum Reliability
  • Maintenance Friendly
  • Easy to Use, Easy to Maintain
  • Smallest Footprint Available
  • Easy Installation
  • Lowest Cost of Ownership

Industries

  • Semiconductor
  • Micro/Nano Electronics
  • Compound Semiconductor
  • Disk Drive
  • Bio/Medical Devices
  • Photonics
  • Aerospace
  • Automotive
  • LED/OLEO
  • Optics
  • MEMS
  • CPV

Products & Services

  • Wafer/Substrate Surface Cleaning, Etching, Plating, Stripping and Texturing Equipment
  • Batch and Single Wafer/Substrates
  • Fully Automated, Semi Automated and Manual
  • Bulk Chemical Distribution Systems
  • Bulk Chemical Recovery Systems
  • Bulk Chemical Mix and Distribution Systems
  • Equipment-Host Connectivity Solutions via SA- GemStation Software (GEM and non-GEM Compliant Tools
  • OEM Wet Process Equipment Reconditioning and Upgrades
  • Applications Engineering
  • Unlimited Options

Standard Features

  • 25 to 100 Wafer Lots
  • 75mm to 300mm Wafers
  • Multi-Lot Processing
  • Parallel-Wafer Size Lot Processing
  • Advanced Intelligent Process Controls
  • Compliant Standards CE, FM, NFPA, NEC, SEMI S2, S8, SOP39

Applications

  • Cleaning
  • Developing
  • Etching
  • Electro-Plating
  • Stripping
  • Texturing
  • Special Applications Engineering

Flexible Options

  • Standard and Custom Applications
  • Class 10 Mini Environment
  • Automatic Etch Rate Calculation
  • IN-Line Chemical Metrology System
  • Automatic Chemical Fill
  • Automatic Chemical Mixing-Dosing/Spiking
  • Fixed or Multi-Frequency Megasonics’s 750kHz to 2.0mHz
  • Fixed or Multi-Frequency Ultrasonic’s 25kHz to 430kHz
  • In Tank Dedicated Agitators 0-80 Cycles Per Min
  • Bi-Directional Chemical Recirculation Flow
  • Single or Double Sided Single Wafer Scrub Station
  • Cassette-less Wafer Processing
  • Drying Technologies
  • Unlimited Automation
  • Unlimited Options