ACURA Hot DI Water System

  • Economical Priced
  • Single Pass Instantaneous Hot Dl Water
  • Compact Foot Print
  • Superior Temperature Controls
  • 0.5 to 45GPM 1.89 to 170LPM Flow Rates
  • Optimized Process Performance
  • Optimized Process Flexibility
  • Reduced Dl Water and Energy Consumption
  • High Purity
  • Maximum Reliability
  • Maintenance Friendly
  • Easy to Use, Easy to Maintain
  • Smallest Footprint Available
  • Easy Installation
  • Lowest Cost of Ownership
  • Point of Use
  • Temperature Range 30C to 95C
  • Multi-Pont Temperature Monitoring and Control
  • Advanced Intelligent Process Controls
  • High Purity Fluid Path
  • FM491 0 Approved Construction
  • 110% Secondary Containment
  • Leak Detection
  • Advanced Safety Controls
  • Isolated Controls
  • Low Voltage Controls 24VDC
  • Power 208VAC, 230VAC, 380VAC, 400VAC and 480VAC 3Ph
  • Compliant Standards CE, FM, NFPA, NEC, SEMI 52, 58, SOP39
  • Semiconductor
  • Micro/Nano Electronics
  • Compound Semiconductor
  • Disk Drive
  • Bio/Medical Devices
  • Photonics
  • Aerospace
  • Automotive
  • LED/OLEO
  • Optics
  • MEMS
  • CPV
  • Cleaning
  • Etching
  • Plating
  • Stripping
  • Texturing
  • Pre and Post Wafer Processing
  • CVD Parts Cleaning
  • Industrial Parts Cleaning
  • Special Applications Engineering
  • 12kW to 1, OOOkW Units Available
  • 0.5 to 45GPM 1.89 to 170LPM Flow Rates
  • Temperature Range 30C to 95C
  • Resistivity Monitoring
  • pH Monitoring
  • Dissolved Oxygen Monitoring
  • 02 Free Dl Water
  • Programmable Dl Water pH Levels
  • Programmable Dl Water Resistivity Levels
  • SA GLAD Systems (Bubble and Membrane Free Gas Dissolving Systems)
  • Programmable Flow Rate Controls
  • Polypropylene or Painted Steel Enclosures
  • Remote Controls
  • Ethernet Communications
  • FIS Interface
  • Wafer/Substrate Surface Cleaning, Etching, Plating, Stripping and Texturing Equipment
  • Batch and Single Wafer/Substrates
  • Fully Automated, Semi Automated and Manual
  • Bulk Chemical Distribution Systems
  • Bulk Chemical Recovery Systems
  • Bulk Chemical Mix and Distribution Systems
  • Equipment-Host Connectivity Solutions via SA- GemStation Software (GEM and non-GEM Compliant Tools)
  • OEM Wet Process Equipment Reconditioning and Upgrades
  • Applications Engineering